Microwave plasma is a type of plasma, that has high frequency electromagnetic radiation in the GHz range. It is capable of exciting electrodeless gas discharges.
If applied in surface-wave-sustained mode, they are especially well suited to generate large-area plasmas of high plasma density. If they are both in surface-wave and resonator mode, they can exhibit a high degree of spatial localisation. This allows to spatially separate the location of plasma generations from the location of surface processing. Such a separation (together with an appropriate gas-flow scheme) may help reduce the negative effect, that particles released from a processed substrate may have on the plasma chemistry of the gas phase.
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